Thin nozzle plate for low printhead deformation

Details Thin nozzle plate for low printhead deformation Thin nozzle plate for low printhead deformation

2007-05-29

2007-05-29

Stephens, Juanita D. (Department: 2853)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C347S047000

Reexamination Certificate

active

10778091

ABSTRACT:
There is disclosed an ink jet printhead which comprises a plurality of nozzles and one or more heater elements corresponding to each nozzle. Each heater element is configured to heat a bubble forming liquid in the printhead to a temperature above its boiling point to form a gas bubble therein. The generation of the bubble causes the ejection of a drop of an ejectable liquid (such as ink) through the respective corresponding nozzle, to effect printing. The printhead has a thin nozzle plate structure formed on the silicon wafer substrate to minimise any buckling of the printhead due to differences in the coefficients of thermal expansion. With minimal buckling, further lithographic etching and deposition processes are possible. Conveniently, the nozzle plate is formed by chemical vapor deposition (CVD) for accuracy and cost effectiveness.

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The Fabrication and Reliability Testing of Ti/TiN Heaters, P.DeMoor, Proceedings of SPIE, Micromachining and Microfabrication Process Technology V, vol. 3874, pp. 284-293.

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