Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
Patent
1994-12-20
1997-10-21
Dang, Thi
Etching a substrate: processes
Forming or treating electrical conductor article
Forming or treating of groove or through hole
216 13, H05H 300
Patent
active
056792689
ABSTRACT:
A process for fabricating thin multi-layer circuit boards which allow the electrical conduction of remodeling pads to be easily cut do not use etching for gold, avoid the lift-off method for forming a thin chromium film on the wiring pattern layer, allow a defective wiring pattern layer to be removed, and which uses uniform heating of the substrate, from the back side thereof, at the time of pre-baking. A barrier metal (60) is excluded from a portion where the electrical conduction of a remodeling pad (62b) is to be cut (FIGS. 1 to 16). Alternatively, gold-plating resist is formed in order to avoid the etching for gold (FIGS. 17 to 19). Alternatively, a thin chromium film is formed in advance by etching on the wiring pattern layer (FIGS. 27 to 33). Alternatively, a metallic barrier film (122) is formed on each of the wiring pattern layers so that the wiring pattern layer can be removed without affecting other wiring pattern layers (FIGS. 36 to 42). Alternatively, the substrate is disposed over a heat-accumulating block (138) adjacent thereto so that it is uniformly heated from the back side thereof during the pre-baking.
REFERENCES:
patent: 5118385 (1992-06-01), Kumar et al.
patent: 5274912 (1994-01-01), Olenick et al.
patent: 5329695 (1994-07-01), Traskos et al.
patent: 5459634 (1995-10-01), Nelson et al.
Iida Kenji
Katayama Hiroyuki
Katsube Toshiro
Kurokawa Yasunaga
Nakano Kazuo
Dang Thi
Fujitsu Limited
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