Thin membrane transducer

Details Thin membrane transducer Thin membrane transducer

2006-08-08

2006-08-08

Patel, Harshad (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

Reexamination Certificate

active

07086288

ABSTRACT:
A transducer includes a substrate and a thin membrane having a shape that can be deflected relative to the substrate to provide an amount of membrane deflection useful for sensing or actuation purposes.

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