Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Ordered or disordered
Patent
1998-04-09
2000-04-18
Niebling, John F.
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Ordered or disordered
438158, 438160, M01L 2100, M01L 2784
Patent
active
060514469
ABSTRACT:
A liquid crystal transducer pixel cell includes support pillars separating a top and bottom plate of the cell. During the process for forming the pixel cell, the support pillars are formed prior to formation of the pixel electrode. This process flow obviates the need for depositing a thick dielectric layer on top of the pixel electrode. This process flow also prevents exposure of the surface of the pixel electrode to etching during subsequent processing, preserving the reflectance of the pixel cell electrode. Finally, the process flow in accordance with the present invention eliminates the creation of keyhole voids within the support pillars by forming the support pillars over a flat upper level intermetal dielectric rather than over narrow trenches formed in the pixel electrode layer.
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Bashir Rashid
Moore Paul M.
Lebentritt Michael S.
National Semiconductor Corporation
Niebling John F.
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