Thin films of compounds and alloy compounds of Group III and Gro

Details Thin films of compounds and alloy compounds of Group III and Gro Thin films of compounds and alloy compounds of Group III and Gro

1982-01-08

1984-01-24

Meros, Edward J.

Coating processes

Electrical product produced

Condenser or capacitor

136262, 252 623GA, C04B 3500

Patent

active

044277148

ABSTRACT:
A thin film of a compound or alloy compound of Group III and Group V elements, particularly of gallium arsenide or gallium arsenide compounds, is produced by impinging, e.g. spraying, onto a heated substrate a liquid or liquids comprising molecules carrying the constituent elements of the desired film.
The constituent elements react together on or immediately above the heated substrate to form the desired compound or alloy compound which is deposited on the substrate in the form of a thin film. The resulting thin films may be used in solar cells and other opto-electronic devices.

REFERENCES:
patent: 4308078 (1981-12-01), Cook
patent: 4327119 (1982-04-01), Lis et al.
Chamberlain, R. R., "Chemical Spray Deposition for Inorganic Films" Journal of the Electrochemical Society, vol. 113, No. 1, pp. 86-89 (Jan. 1966).
Manasevit, H. M., "The Use of Metal Organics in the Preparation of Semiconductor Materials I. Epitaxial Gallium V Compounds" Journal of the Electrochemical Society vol. 116, No. 12, pp. 1725-1732 (1969).

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