Thin film varistor array

Details Thin film varistor array Thin film varistor array

2011-06-28

2011-06-28

Lee, Kyung (Department: 2833)

Electrical resistors

Resistance value responsive to a condition

Current and/or voltage

C338S013000

Reexamination Certificate

active

07969276

ABSTRACT:
A method of forming a thin film varistor array includes creating a metal-metal oxide-metal layer stack without breaking vacuum. The stack is patterned as a plurality of bus lines, each having a plurality of varistor islands formed thereon.

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