Thin film transistors and active matrices including the same

Details Thin film transistors and active matrices including the same Thin film transistors and active matrices including the same

1995-02-14

1996-09-10

Carroll, J.

Active solid-state devices (e.g., transistors, solid-state diode

Non-single crystal, or recrystallized, semiconductor...

Field effect device in non-single crystal, or...

257 49, 257 66, 257 72, 257347, 257532, H01L 2976

Patent

active

055548610

ABSTRACT:
Thin file transistor including polycrystalline silicon or amorphous silicon thin film channel regions having a thickness of between about 100 .ANG. and 2500 .ANG. which are thinner than at least a portion of the source and drain regions and active matrix assemblies including thin film transistors for improved electro-optical displays are provided.

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Future Trends for TFT Integrated Circuits on Glass Substrates, IEEE 1989, Hiroyuki Ohshima, et al., pp. IEDM 89157-89160.

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