Thin film transistor with low angle grain boundaries in a...

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Non-single crystal – or recrystallized – material with...

Reexamination Certificate

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C257S066000, C257SE29003

Reexamination Certificate

active

11017673

ABSTRACT:
A thin film transistor includes a substrate, a semiconductor layer pattern on the substrate, a gate insulating layer on the semiconductor layer pattern, and a gate electrode on a gate insulating layer. Low angle grain boundaries of polysilicon formed in a channel layer in the semiconductor layer pattern are tilted −15 to 15° with respect to a current flowing direction.

REFERENCES:
patent: 6602765 (2003-08-01), Jiroku et al.
patent: 6916690 (2005-07-01), Chang
patent: 6939754 (2005-09-01), Moriguchi et al.
patent: 2003/0193069 (2003-10-01), Park et al.
patent: 07-226374 (1995-08-01), None
patent: 08-097137 (1996-04-01), None
patent: 10-214974 (1998-08-01), None
patent: 11-097352 (1999-04-01), None
patent: 2001-326176 (2001-11-01), None
patent: 10-2003-0060403 (2003-07-01), None

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