Thin film transistor substrate and method of manufacturing...

Details Thin film transistor substrate and method of manufacturing... Thin film transistor substrate and method of manufacturing...

2011-03-08

2011-03-08

Stahl, Mike (Department: 2874)

Liquid crystal cells, elements and systems

Particular excitation of liquid crystal

Electrical excitation of liquid crystal

Reexamination Certificate

active

07903188

ABSTRACT:
A method of fabricating a liquid crystal display device includes forming a gate electrode; forming a gate insulator on the gate electrode, an active layer on the gate insulator, and an etch stopper on the active layer; depositing an ohmic contact layer, a first metal layer and a second metal layer on the substrate; etching the ohmic contact layer, and the first and second metal layers to form ohmic contact patterns, and first and second metal patterns including source, drain and pixel electrodes using a single photomask.

REFERENCES:
patent: 5407845 (1995-04-01), Nasu et al.
patent: 2003/0017636 (2003-01-01), Lay et al.
patent: 2005/0157236 (2005-07-01), Kawasaki
patent: 2005/0285195 (2005-12-01), Choi et al.
patent: 2007/0246707 (2007-10-01), Deng et al.
patent: 2008/0002125 (2008-01-01), Kim

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