Optical: systems and elements – Prism – With reflecting surface
Patent
1989-10-02
1992-01-28
Wojciechowicz, Edward J.
Optical: systems and elements
Prism
With reflecting surface
357 4, 357 41, 357 45, 357 51, 357 55, 357 68, 359 59, H01L 2348
Patent
active
050849050
ABSTRACT:
A thin film transistor panel has a substrate on which a plurality of electrode lines are aligned in a matrix form, thin film transistors which are formed on crossing portions of the plurality of the electrode lines, a diffusible insulating film for covering said thin film transistors, and metal-diffused layers and are connected to source electrodes. The metal-diffused layers are formed by diffusing a metal into predetermined areas of said insulating film. If the metal-diffused layers are used as the pixel electrodes, high density display can be obtained due to the fine pixel electrodes. In addition, a manufacturing method of thin film transistor panel having the steps of forming gate electrode on a substrate, forming gate insulating films on the gate electrodes, forming semiconductor layers on said gate insulating films, forming source and drain electrodes on said semiconductor layers except for channel portions, forming a diffusible insulating film which covers the whole surface of the substrate, providing contact holes in said insulating film corresponding to said source electrodes, and forming metal-diffused layers by diffusing a metal into the insulating film and inner surfaces of said contact holes. The metal-diffused areas can be formed in high pattern accuracy, and the fine pixel electrodes can be easily obtained if the metal-diffused areas are used as the pixel electrodes.
REFERENCES:
patent: 4683442 (1987-07-01), Vyne
patent: 4748490 (1988-05-01), Hollingsworth
patent: 4899205 (1990-02-01), Hamdy et al.
Mori Hisatoshi
Sasaki Makoto
Sato Syunichi
Casio Computer Co. Ltd.
Wojciechowicz Edward J.
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