Thin film transistor, organic electroluminescence display device

Details Thin film transistor, organic electroluminescence display device Thin film transistor, organic electroluminescence display device

1997-05-13

1999-04-27

Niebling, John F.

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

148DIG150, H01L 2100

Patent

active

058973281

ABSTRACT:
An organic EL display device has a substrate, a plurality of organic EL elements formed on the substrate and a plurality of thin film transistors formed on the substrate. The transistors are connected to the respective EL elements for controlling current applied to the respective elements. Each of the transistors includes an active layer of semiconductor material, formed on the substrate, a source region and a drain region being formed in the active layer, a source electrode of aluminum material electrically coupled to the source region formed in the active layer, a drain electrode of aluminum material electrically coupled to the drain region formed in the active layer, an insulation layer formed on the active layer, a gate electrode formed on the insulation layer, a first barrier metal layer of titanium nitride containing equal to or less than 50 atm % of nitrogen or titanium, inserted between the source electrode and the source region of the active layer, and a second barrier metal layer of titanium nitride containing equal to or less than 50 atm % of nitrogen or titanium, inserted between the drain electrode and the drain region of the active layer.

REFERENCES:
patent: 4266223 (1981-05-01), Frame
patent: 4602192 (1986-07-01), Nomura et al.
patent: 5294869 (1994-03-01), Tang et al.
patent: 5294870 (1994-03-01), Tang et al.
patent: 5384517 (1995-01-01), Uno
patent: 5550066 (1996-08-01), Tang et al.

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