Thin film transistor, method for fabricating the same and...

Details Thin film transistor, method for fabricating the same and... Thin film transistor, method for fabricating the same and...

2010-02-01

2011-11-22

Parker, Kenneth (Department: 2815)

Semiconductor device manufacturing: process

Having organic semiconductive component

C257S040000, C257SE51001

Reexamination Certificate

active

08062924

ABSTRACT:
A method for fabricating a TFT on a substrate includes forming a gate electrode; forming a semiconductor layer insulated from the gate electrode and partially overlapped with the gate electrode; forming a gate insulating layer between the gate electrode and the semiconductor layer, the gate insulating layer including a sol-gel compound; and forming source and drain electrodes at both sides of the semiconductor layer.

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