Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Field effect device in non-single crystal – or...
Patent
1996-03-28
1998-06-16
Loke, Steven H.
Active solid-state devices (e.g., transistors, solid-state diode
Non-single crystal, or recrystallized, semiconductor...
Field effect device in non-single crystal, or...
257 72, 257347, H01L 2976, H01L 2904, H01L 2701
Patent
active
057675295
ABSTRACT:
A thin-film transistor comprising an active silicon pattern which is formed of a plurality of island-like regions arranged in parallel to each other, the island-like regions being formed of a polycrystal silicon thin film and each having a plane area of 1000 .mu.m.sup.2 or less.
Arai Michio
Kobori Isamu
Loke Steven H.
Semiconductor Energy Laboratory Co,. Ltd.
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