Thin film transistor array inspection apparatus

Details Thin film transistor array inspection apparatus Thin film transistor array inspection apparatus

2006-02-07

2006-02-07

Nguyen, Vinh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S701000

Reexamination Certificate

active

06995576

ABSTRACT:
A TFT array inspection apparatus includes an electron beam source for irradiating an electron beam, a detecting device for detecting an electron beam emitted from a sample upon irradiating the electron beam to output a detected signal, and a sample potential changing device for changing a sample potential. A calibration device calibrates the detected signal using a calibration curve of the sample potential and the detected signal to obtain the sample potential.

REFERENCES:
patent: 4730158 (1988-03-01), Kasai et al.
patent: 6657192 (2003-12-01), Kim et al.
patent: 6703850 (2004-03-01), Nozoe et al.
patent: 6734687 (2004-05-01), Ishitani et al.
patent: 6753524 (2004-06-01), Matsui et al.
patent: 2002/0093350 (2002-07-01), Yamada
patent: 2004/0017212 (2004-01-01), Litman et al.

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