Thin film transistor and manufacturing method thereof

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Amorphous semiconductor material

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257 59, 257 66, H01L 2978, H01L 2712

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active

058892907

ABSTRACT:
A thin film transistor and a simplified manufacturing method thereof, which results in enhanced charge mobility. The thin film transistor includes: a substrate; a gate electrode on said substrate; a gate insulating layer on said substrate and said gate electrode; a doped semiconductor layer, on the gate insulating layer, which is split into a first and second portion; a first metal layer on the first doped semiconductor portion; a second metal layer on the second doped semiconductor portion; and a top semiconductor layer in a gap formed by the first and second metal layer: the first doped semiconductor portion, the second doped semiconductor portion, and the insulating layer.

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