Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Field effect device in non-single crystal – or...
Patent
1996-04-10
1997-12-02
Thomas, Tom
Active solid-state devices (e.g., transistors, solid-state diode
Non-single crystal, or recrystallized, semiconductor...
Field effect device in non-single crystal, or...
257336, 257347, 257408, 257387, 349 43, 349 48, H01L 2701, H01L 2976
Patent
active
056939590
ABSTRACT:
A thin film transistor comprises a source region, a drain region and a channel region formed in a thin film silicon region on an insulating substrate and a gate electrode formed via a gate insulating film on the channel region; at least one of the source region and the drain region has a high-concentration impurity region and a low-concentration impurity region; the channel region is in contact with the low-concentration impurity region; the low-concentration impurity region comprises at least a first region and a second region; the first region comprises a thin film having about the same thickness as the channel region; the second region comprises a thin film having about the same thickness as the high-concentration impurity region which is thicker than the first region. A liquid crystal display has TFT substrates wherein the thin film transistors are arranged in the form of a matrix. A liquid crystal display is equipped with a plurality of the thin film transistors, wherein either of an electrode of the source region and an electrode of the drain region is connected to a transparent electrode.
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Patent Abstracts of Japan, vol. 017, No. 453 (E-1417, Aug. 19, 1993 & JP 05 102483 A (Sharp Corp.), Apr. 23, 1993.
Patent Abstracts of Japan, vol. 018, No. 022 (E-1490), Jan. 13,1994 & JP 05 259457 A (Sharp Corp.) Oct. 8, 1993.
Minoru Matsuo et al: "Poly-Si TFTS With LDD Structure Fabricated At Low Temperature", Aug. 29, 1993, International Conference on Solid State Devices and Materials, pp. 437-439 XP000409416, p. 438, col.2; Fig. 4.
Ichikawa Takeshi
Inoue Shunsuke
Abraham Fetsum
Canon Kabushiki Kaisha
Thomas Tom
LandOfFree
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