Thin film transistor and fabrication method thereof

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Field effect device in non-single crystal – or...

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257344, 257401, 438166, 438286, 438595, H01L 2128, H01L 21336, H01L 2941, H01L 29786

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active

06011276&

ABSTRACT:
A thin film transistor and a fabrication method thereof which are capable of increasing an ON/OFF current ratio and simplifying a fabrication process by eliminating a masking process. The thin film transistor includes a substrate, an active layer formed on the substrate, a gate electrode formed on the active layer and the substrate and having an opening portion inwardly extended from one edge surface thereof, an offset region formed in the active layer matching with the opening portion, and impurity regions formed within the active layer at both sides of the gate electrode.

REFERENCES:
patent: 5151374 (1992-09-01), Wu
patent: 5741718 (1998-04-01), Codama et al.
patent: 5741736 (1998-04-01), Orlowski et al.
patent: 5804837 (1998-09-01), Han et al.
Tanaka et al., "Characteristics of Offset-Structure Polycrystalline-Silicon Thin-Film Transistors", IEEE Electron Device Letters, vol. 9, No. 1, Jan. 1988, pp. 23-25

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