Thin-film three-axis magnetometer and squid detectors for use th

Details Thin-film three-axis magnetometer and squid detectors for use th Thin-film three-axis magnetometer and squid detectors for use th

1990-12-26

1992-08-25

Strecker, Gerard R.

Electricity: measuring and testing

Magnetic

Magnetometers

324247, 324249, 333 99S, 333246, 357 5, 357 27, 505846, G01R 33035, H01L 3922

Patent

active

051422298

ABSTRACT:
A magnetometer is prepared by depositing three thin-film SQUID magnetic field detectors upon a substrate. Two of the detectors incorporate stripline SQUID detectors deposited at right angles to each other, to measure the orthogonal components of a magnetic field that lie in the plane of the substrate. The third detector uses a planar loop SQUID detector that measures the component of the magnetic field that is perpendicular to the substrate. The stripline SQUID detectors have thin-film base and counter electrodes separated by an insulating layer which is at least about 1 micrometer thick, and a pair of Josephson junctions extending between the electrodes through the insulating layer.

REFERENCES:
patent: 4588947 (1986-05-01), Ketchen
patent: 4749946 (1988-06-01), Hoenig
patent: 4804915 (1989-02-01), Hoenig
patent: 4869598 (1989-09-01), McDonald
patent: 5012190 (1991-04-01), Dossel
Sergio Erne, "Squid Sensors", pp. 69-84 of Biomagnetism, ed. by Samuel J. Williamson et al., Plenum Press, 1983.
T. Katila, "Principles and Applications of SQUID Sensors", in Advances in Biomagnetism, ed. by Samuel J. Williamson et al., Plenum Press, 1989.
M. W. Cromar and P. Carelli, "Low Noise tunnel junction dc SQUID's" Appl. Phys. Lett, vol. 38(9), pp. 723-725 (1981).

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