Thin film thickness measurement with thermal waves

Details Thin film thickness measurement with thermal waves Thin film thickness measurement with thermal waves

1983-04-01

1985-06-11

Yasich, Daniel M.

Thermal measuring and testing

Distance or angle

Thickness, erosion, or deposition

356 43, 356376, 356381, 374 5, 374 57, G01N 2141, G01N 2572

Patent

active

045225109

ABSTRACT:
A method and apparatus for thin film thickness measurements with thermal waves in which heating and detection laser beams are focused onto the film, normal to the surface of the film, with the two beams parallel and non-coaxial.

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