Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – Coating
Patent
1996-10-23
1999-05-25
Yamnitzky, Marie
Superconductor technology: apparatus, material, process
Processes of producing or treating high temperature...
Coating
505473, 505474, 505741, 505742, 505237, 505238, 505701, 505500, 428930, H01L 3924
Patent
active
059069651
ABSTRACT:
A high temperature superconductor (HTS) tri-layer structure and a method for providing the same are described. Preferable two dimensional growth for all layers is provided resulting in smooth surfaces and highly crystalline layers. Full oxygenation of HTS under-layer(s) is provided despite having thick intervening dielectric mid-layer. HTS over- and under-layers are preferably structurally and electrically similar and have high crystallinity, the HTS layers have high T.sub.c (e.g. >90K) comparable to T.sub.c of single layer superconductor layers and a high J.sub.c (e.g. >10.sup.6 A/cm.sup.2), the tri-layer properties do not significantly degrade as the thickness of the layers is increased, and the dielectric mid-layer has high resistivity and is substantially pin-hole free. The HTS tri-layer structure of the present invention is achieved by using a capping-layer to protect the HTS under-layer, by conducting an oxygen anneal to fully oxygenate the HTS layers, and/or by thermally matching the substrate to the other layers (e.g. by using buffer layers to overcome lattice mismatch problems). The present invention also provides an improved HTS capacitor having low loss at microwave frequencies and having a smaller size and/or greater capacitance per area unit when compared to convention HTS capacitors.
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Y. Tazoh et al., "Extremely smooth YBa.sub.2 Cu.sub.3 Oy thin films grown using the reactive coevaporation technique in radical oxygen at an ultra low growth rate", Appl. Phys. Lett. 62(4), pp. 408-410, Jan. 25, 1993.
S. C. Tidrow et al., "Oxygen diffusion through dielectrics: A critical parameter in high critical temperature superconductors multilayer technology", J. Mater. Res., vol. 10, No. 7, pp. 1622-1634, Jul. 1995.
"Planar Transmission Line Resonators from YBA.sub.2 CU.sub.3 O.sub.7-x Thin Films and Epitaxial Sis Multilayers," W. Rauch, E. Gornik, A.A. Valenzuela, G. Solkner, F. Fox, H. Behner, G. Gieres, and P. Russer, IEEE Transactions on Applied Superconductivity, vol. 3, No. 1, Mar. 1993, pp. 1110-1113.
"In-Situ Low Pressure Oxygen Annealing of YBa.sub.2 CU.sub.3 O.sub.7-.delta. Single- and Multilayer Systems," G. Ockenfub, R. Wordenweber, TA Scherer, R. Unger, and W. Jutzi, Physica C 243 (1995), pp. 24-28.
Superconductor Technologies Inc.
Yamnitzky Marie
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