Thin-film strain gauge system and method of manufacturing same

Details Thin-film strain gauge system and method of manufacturing same Thin-film strain gauge system and method of manufacturing same

1987-07-30

1988-11-22

Goldberg, E. A.

Electrical resistors

Strain gauge type

338 5, 296211, G01L 122

Patent

active

047868872

ABSTRACT:
Thin film strain gauge system consisting of an elastically deformable flexible metallic substrate on which an electrically insulating layer of a plasma-polymerized material, in particular of Si:N:O:C:H-containing compounds and thereon a structured resistance layer as well as an electrically readily conducting layer having a structure for the electrical contacting are provided.

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