Measuring and testing – Volumetric content measuring
Patent
1978-08-28
1980-01-29
Swisher, S. Clement
Measuring and testing
Volumetric content measuring
73775, 338 2, G01L 122
Patent
active
041854969
ABSTRACT:
A thin film strain gage is deposited on a flexure beam under controlled deposition conditions such that the dielectric parts thereof are normally in a compressive state. During use, when the strain gage is flexed in a manner tending to place parts thereof in tension, the dielectric parts are instead maintained either in compression, which is their more resistant state against mechanical fracture, or only in slight tension. Specifically, the dielectric films are deposited by sputtering with the substrate negatively biased, with the deposition rate and substrate temperature maintained at predetermined levels for enhancing compressive deposition.
REFERENCES:
patent: 3080748 (1963-03-01), Burkley
patent: 3596269 (1971-07-01), Laska
patent: 3986254 (1976-10-01), Nordstrom
patent: 4104605 (1978-08-01), Boudreaux
Bolker Barry F. T.
Tisone Thomas C.
Baumann Russell E.
Gould Inc.
Netter George J.
Snee, III Charles E.
Swisher S. Clement
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