Thin-film solar cells and method of making

Details Thin-film solar cells and method of making Thin-film solar cells and method of making

2006-05-09

2006-05-09

Diamond, Alan (Department: 1753)

Coating processes

Direct application of electrical, magnetic, wave, or...

Electromagnetic or particulate radiation utilized

C427S585000, C427S586000, C427S588000, C427S596000, C427S074000, C427S058000, C438S097000, C438S492000, C438S493000, C438S507000

Reexamination Certificate

active

07041342

ABSTRACT:
There are now provided thin-film solar cells and method of making. The devices comprise a low-cost, low thermal stability substrate with a semiconductor body deposited thereon by a deposition gas. The deposited body is treated with a conversion gas to provide a microcrystalline silicon body. The deposition gas and the conversion gas are subjected to a pulsed electromagnetic radiation to effectuate deposition and conversion.

REFERENCES:
patent: 4814842 (1989-03-01), Nakagawa et al.
patent: 5242530 (1993-09-01), Batey et al.
patent: 5387542 (1995-02-01), Yamamoto et al.
patent: 5456763 (1995-10-01), Kaschmitter et al.
patent: 5618758 (1997-04-01), Tomita et al.
patent: 5624873 (1997-04-01), Fonash et al.
patent: 6440824 (2002-08-01), Hayashi et al.
patent: 6670543 (2003-12-01), Lohmeyer et al.
patent: 2002/0022349 (2002-02-01), Suguyama et al.
patent: 2005/0022864 (2005-02-01), Fujioka et al.
patent: 4-127580 (1992-04-01), None
patent: 6-140327 (1994-05-01), None
patent: 6-291061 (1994-10-01), None
patent: 10-291897 (1998-11-01), None
patent: 10-313125 (1998-11-01), None
Wohllebe et al, Journal of Non-Crystalline Solids, vol. 227-230, pp. 925-929, (1998).
Roca et al, Thin Solid Films, vol. 337, pp. 23-26, (1999).
Roca et al, Journal of Applied Physics, vol. 86, No. 12, pp. 7079-7082, (Dec. 15, 1999).
Homma et al, Proceedings of the 2003 International Microprocesses and Nanotechnology Conference, pp. 48-49, (Oct. 29-31, 2003).
Matsuda et al, “Growth mechanism of microcrystalline silicon obtained from reactive plasmas,” Thin Solid Films, vol. 337, issues 1-2, pp. 1-6, Feb. 24, 1999.
Asano, “Effects of hydrogen atoms on the network structure of hydrogenated amorphous and microcrystalline silicon thin films,” Appl. Phys. Lett., vol. 58(6), pp. 533-535, Feb. 5, 1990.

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