Thin film silicon semiconductor device and process for producing

Details Thin film silicon semiconductor device and process for producing Thin film silicon semiconductor device and process for producing

1992-03-26

1993-09-28

Hearn, Brian E.

Fishing, trapping, and vermin destroying

257 52, 148DIG1, 20419212, 20419225, H01L 2100, H01L 2102, H01L 2120

Patent

active

052486303

ABSTRACT:
A thin film silicon semiconductor device provided on a substrate according to the present invention comprises a thin polycrystalline silicon film having a lattice constant smaller than that of a silicon single crystal and a small crystal grain size. This thin polycrystalline silicon film can be obtained by depositing a thin amorphous silicon film in an inert gas having a pressure of 3.5 Pa or lower by a sputtering deposition method and annealing the thin amorphous silicon film for a short time of 10 seconds or less to effect polycrystallization thereof. A thin film silicon semiconductor device comprising such a thin polycrystalline silicon film having a small lattice constant has excellent characteristics including a carrier mobility of 100 cm.sup.2 /V.multidot.s or higher.

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