Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Patent
1995-01-19
1997-03-18
Fields, Carolyn E.
Radiant energy
Invisible radiant energy responsive electric signalling
Infrared responsive
7351434, G01J 510
Patent
active
056125364
ABSTRACT:
A thin film sensor element includes a sensor holding substrate having an opening part and a multilayer film adhered thereon at least consisting of an electrode film A, an electrode film B having (100) plane orientation, and a piezoelectic dielectric oxide film present between the electrode film A and the electrode film B. As a result, a thin film sensor element which is small, light, highly accurate, and inexpensive can be attained which can be used for an acceleration sensor element and a pyroelectric infrared sensor element. On the surface of a flat plate KBr substrate, a rock-salt crystal structure oxide of a conductive NiO is formed by a plasma MOCVD method whose vertical direction is crystal-oriented to <100> direction against the substrate surface. By means of a sputtering method, a PZT film is formed by an epitaxial growth on that surface, and a Ni-Cr electrode film is formed thereon. Next, the multilayer film structure is reversed and adhered to a sensor substrate having an opening part with an adhesive. After a connection electrode is connected, the whole structure is washed with water, thereby removing the KBr substrate.
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patent: 5286975 (1994-02-01), Ogura et al.
patent: 5413667 (1995-05-01), Fujii et al.
patent: 5448068 (1995-09-01), Lee et al.
Hattori Masumi
Hayashi Shigenori
Hirao Takashi
Kamada Takeshi
Takayama Ryoichi
Fields Carolyn E.
Matsushita Electric - Industrial Co., Ltd.
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