Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having substrate registration feature
Reexamination Certificate
2006-09-12
2006-09-12
Parekh, Nitin (Department: 2811)
Semiconductor device manufacturing: process
Formation of electrically isolated lateral semiconductive...
Having substrate registration feature
C438S462000, C438S975000, C438S166000
Reexamination Certificate
active
07105419
ABSTRACT:
A thin-film semiconductor substrate includes an insulative substrate, an amorphous semiconductor thin film that is formed on the insulative substrate, and a plurality of alignment marks that are located on the semiconductor thin film and are indicative of reference positions for crystallization.
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Hiramatsu Masato
Jyumonji Masayuki
Kimura Yoshinobu
Matsumura Masakiyo
Ogawa Hiroyuki
Advanced LCD Technologies Development Center Co. Ltd.
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Parekh Nitin
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