Thin film semiconductor gas sensor having an integrated heating

Details Thin film semiconductor gas sensor having an integrated heating Thin film semiconductor gas sensor having an integrated heating

1981-04-16

1982-07-06

Serwin, Ronald E.

Chemical apparatus and process disinfecting, deodorizing, preser

Analyzer, structured indicator, or manipulative laboratory...

Means for analyzing gas sample

23232E, 73 27R, 324 71SN, 338 34, G01N 2704

Patent

active

043382819

ABSTRACT:
A thin film semiconductor gas sensor including a metal oxide semiconductor sensor layer whose electrical resistance changes in dependence upon the nature and concentration of a gas being detected and having a heating element integrated therewith is improved by forming the sensor from a semiconductor body having a shell zone located relatively close to an outer surface of such body and being doped to the point of degeneration, with two spaced apart metal contact strips being positioned on such doped shell zone for connection with a current source to heat the sensor.

REFERENCES:
patent: 3751968 (1973-08-01), Loh et al.
patent: 3865550 (1975-02-01), Bott et al.
patent: 3901067 (1975-08-01), Boardman, Jr. et al.
patent: 4045178 (1977-08-01), Okinaka et al.

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