Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Field effect device in non-single crystal – or...
Reexamination Certificate
2005-11-29
2005-11-29
Tran, Minh-Loan (Department: 2826)
Active solid-state devices (e.g., transistors, solid-state diode
Non-single crystal, or recrystallized, semiconductor...
Field effect device in non-single crystal, or...
C257S072000, C257S349000
Reexamination Certificate
active
06969871
ABSTRACT:
In a film semiconductor device according to the present invention, a continuous oscillating light beam from a solid laser or the like is modulated on time axis and spatially, thereby realizing crystal growth that is nearly optimum for a crystal structure and growth speed of crystals in a Si thin film. Crystal grains with a large diameter, flatness with no projections at their grain boundaries, and controlled surface orientations are thereby formed. By forming channels with these crystal grains, high mobility semiconductor devices and an image display device using these semiconductor devices are realized.
REFERENCES:
patent: 2002/0031876 (2002-03-01), Hara et al.
patent: 2002/0100909 (2002-08-01), Yamaguchi et al.
patent: 2002/0102823 (2002-08-01), Yamaguchi et al.
patent: 2003/0181043 (2003-09-01), Tanada et al.
patent: 2003/0183875 (2003-10-01), Isobe et al.
patent: 2003/0230749 (2003-12-01), Isobe et al.
patent: 2003/0230750 (2003-12-01), Koyama et al.
patent: A-7-321339 (1995-12-01), None
patent: A-08-55808 (1996-02-01), None
patent: A-10-41234 (1998-02-01), None
S. M. Sze, “Physics of Semiconductor Devices,” Second Edition, 1981, John Wiley & Sons, New York, USA.
Hatano Mutsuko
Park Sedng-Kee
Shiba Takeo
Tai Mitsuharu
Yamaguchi Shin'ya
Antonelli Terry Stout & Kraus LLP
Hitachi , Ltd.
Tran Minh-Loan
LandOfFree
Thin film semiconductor device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Thin film semiconductor device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thin film semiconductor device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3471215