Thin film saw filter including doped electrodes

Details Thin film saw filter including doped electrodes Thin film saw filter including doped electrodes

1995-09-28

1997-05-27

Lee, Benny

Wave transmission lines and networks

Coupling networks

Electromechanical filter

310313A, H03H 964

Patent

active

056336160

ABSTRACT:
A surface acoustic wave (SAW) filter includes a monocrystalline substrate, such as sapphire, having a surface and an epitaxial piezoelectric layer disposed on the surface of the substrate. The piezoelectric layer is a semiconductor material that is relatively heavily doped in regions at the interface between the substrate and the piezoelectric layer. The heavily doped regions functions as electrodes. Because the electrodes at the interface are made of the same material as the piezoelectric layer, there is no disturbance of the crystallinity of the piezoelectric layer during its deposition and thermal stresses during use are substantially reduced.

REFERENCES:
patent: 3827002 (1974-07-01), Chao
patent: 4025876 (1977-05-01), Fletcher et al.
patent: 4531107 (1985-07-01), Okamoto et al.
patent: 5061870 (1991-10-01), Ieki et al.
patent: 5432393 (1995-07-01), Davenport

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