Thin film sampler for film composition quantitative analysis

Measuring and testing – Sampler – sample handling – etc. – Flow divider – deflector – or interceptor

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

437 8, H01L 2166, H01L 21306, G01N 3100, G01N 128

Patent

active

053257308

ABSTRACT:
A semiconductor test fixture is described for sampling thin films on the surface of a semiconductor wafer in the process of manufacturing integrated circuits thereon. A first plate is provided for supporting the wafer. At least one test fluid reservoir, and usually three reservoirs having a projecting collar or flange around one end thereof an an O-ring under the collar. A second late having at least one opening therein for allowing the major portion of the at least one test fluid reservoir to pass through and with the collar of the reservoir supporting the second plate. A hand screw is associated with the first and second plates for tightening second plate against the collar of the reservoir and, in turn the O-ring of the collar against the wafer which is supported upon the first plate so as to allow a fluid to be contained in the reservoir without leakage.

REFERENCES:
patent: 1792606 (1931-02-01), Richards et al.
patent: 2959471 (1960-11-01), Morgia
patent: 4244775 (1981-01-01), D'Asaro
patent: 4512847 (1985-04-01), Brunsch et al.
patent: 4544446 (1985-10-01), Cady
patent: 4551434 (1985-11-01), Thoma
patent: 4584886 (1986-04-01), Matsunaga et al.
patent: 4634497 (1987-01-01), Shimazaki
patent: 4783172 (1988-11-01), Garg
patent: 4885941 (1989-12-01), Vardoulakis et al.
patent: 4996160 (1991-02-01), Hazlitt et al.
patent: 5264184 (1993-11-01), Aysta et al.
"VLSI Technology" Second Edition by S. M. Sze, Published by McGraw Hill International Editions, N.Y., N.Y., 1988, Chapter 12.4 pp.548-554.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Thin film sampler for film composition quantitative analysis does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thin film sampler for film composition quantitative analysis, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thin film sampler for film composition quantitative analysis will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-789786

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.