Measuring and testing – Sampler – sample handling – etc. – Flow divider – deflector – or interceptor
Patent
1993-07-01
1994-07-05
Noland, Thomas P.
Measuring and testing
Sampler, sample handling, etc.
Flow divider, deflector, or interceptor
437 8, H01L 2166, H01L 21306, G01N 3100, G01N 128
Patent
active
053257308
ABSTRACT:
A semiconductor test fixture is described for sampling thin films on the surface of a semiconductor wafer in the process of manufacturing integrated circuits thereon. A first plate is provided for supporting the wafer. At least one test fluid reservoir, and usually three reservoirs having a projecting collar or flange around one end thereof an an O-ring under the collar. A second late having at least one opening therein for allowing the major portion of the at least one test fluid reservoir to pass through and with the collar of the reservoir supporting the second plate. A hand screw is associated with the first and second plates for tightening second plate against the collar of the reservoir and, in turn the O-ring of the collar against the wafer which is supported upon the first plate so as to allow a fluid to be contained in the reservoir without leakage.
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"VLSI Technology" Second Edition by S. M. Sze, Published by McGraw Hill International Editions, N.Y., N.Y., 1988, Chapter 12.4 pp.548-554.
Noland Thomas P.
Saile George O.
Taiwan Semiconductor Manufacturing Company
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