Thin film rotation sensor

Details Thin film rotation sensor Thin film rotation sensor

1994-09-29

1996-07-09

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using wave or beam motion

7350402, G01P 900

Patent

active

055333958

ABSTRACT:
A diaphragm is disposed over a cavity formed in a silicon base. A plurality of electrodes are radially disposed about the diaphragm overlying the cavity, and a signal applying circuit applies a signal to the plurality of electrodes so that portions of the diaphragm flex for establishing a net angular momentum (e.g., the flexing of the diaphragm simulates a circumferentially traveling wave). A deformation sensing circuit comprising a plurality of strain gages interconnected to form a corresponding plurality of Wheatstone bridges are disposed about the periphery of the cavity along orthogonal axes for sensing deformation of the structure about the orthogonal axes.

REFERENCES:
patent: 3307409 (1967-03-01), Newton
patent: 4644793 (1987-02-01), Church
patent: 4655081 (1987-04-01), Burdess

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