Measuring and testing – Gas analysis – By vibration
Patent
1998-04-13
1999-08-10
Williams, Hezron
Measuring and testing
Gas analysis
By vibration
310324, G01N 700, H01L 4104
Patent
active
059361506
ABSTRACT:
A miniature chemical sensor using a thin film acoustic resonator coated with a chemically sensitive sorbent coating. The thin film acoustic resonator has electrodes separated by a thin piezoelectric layer and is supported by a multilayer resonant acoustic isolator. The resonant acoustic isolator has alternating layers of high and low acoustic impedance material, each layer being one quarter acoustic wavelength thick or an odd multiple thereof at the resonant frequency. The resonant acoustic isolator is solidly mounted on a substrate but provides acoustic isolation between the thin film acoustic resonator and the substrate at a resonant frequency.
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Harker Alan B.
Kobrin Paul H.
O'Toole Ronald P.
Seabury Charles W.
Politzer Jay L.
Rockwell Science Center LLC
Williams Hezron
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