Thin film resistors on organic surfaces

Details Thin film resistors on organic surfaces Thin film resistors on organic surfaces

1994-12-05

1997-10-07

Walberg, Teresa J.

Electrical resistors

With base extending along resistance element

Resistance element coated on base

338312, 29621, 437 60, 437918, H01C 1012, H01L 2700

Patent

active

056753101

ABSTRACT:
A method for fabricating a thin film resistor comprises applying a tantalum nitride layer over a dielectric layer, applying a metallization layer over the tantalum nitride layer, and patterning the metallization layer with a first portion of the metallization layer situated apart from a second portion of the metallization layer and both the first and second portions being at least partially situated on the tantalum nitride layer. In one embodiment, after patterning the metallization layer, the resistance value between the first and second portions of the metallization layer is determined and compared to a predetermined resistance value, and at least one of the first and second portions is trimmed to obtain a modified resistance value between the first and second portions that is closer to the predetermined resistance value than the determined resistance value.

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