Electrical resistors – With base extending along resistance element – Resistance element coated on base
Patent
1993-11-09
1996-12-17
Hoang, Tu
Electrical resistors
With base extending along resistance element
Resistance element coated on base
338314, 338 22SD, 1566561, 20419221, 29620, H01C 1012
Patent
active
055857760
ABSTRACT:
In a first embodiment of the invention a layer of ruthenium oxide is reactively deposited onto a substrate, then annealed for TCR adjustment and for stabilization. In a second, bi-layer embodiment of the invention, a layer of tantalum nitride is first reactively deposited onto a substrate, then annealed for stabilization. After a ruthenium oxide layer is reactively deposited onto the annealed tantalum nitride layer, the structure is annealed until a near-zero effective TCR for the bi-layer resistor is achieved. The ruthenium oxide capping layer serves as a barrier against chemical attack.
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Anderson Wayne
Collins Franklyn M.
Jia Quanxi
Jiao Kaili
Lee Hoong J.
Blasiak, Esq. George
Hoang Tu
Johnson, Esq. Christine
Research Foundation of the State University of NY
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