Thin-film resistor with high temperature coefficient for use...

Details Thin-film resistor with high temperature coefficient for use... Thin-film resistor with high temperature coefficient for use...

2005-04-26

2005-04-26

Fourson, George (Department: 2823)

Semiconductor device manufacturing: process

Making passive device

Resistor

C250S332000, C250S338200

Reexamination Certificate

active

06884690

ABSTRACT:
The invention relates to a semiconductor component with a WSiN layer as thin-film resistor with high temperature coefficient for use as thermistor in bolometers. The production method comprises thermal decoupling by means of thermistors that are free-standing or disposed on an insulation layer.

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