Thin film resistor structure and method of fabricating a...

Details Thin film resistor structure and method of fabricating a... Thin film resistor structure and method of fabricating a...

2008-07-22

2008-07-22

Ahmed, Shamim (Department: 1792)

Electrical resistors

With base extending along resistance element

Resistance element coated on base

C338S308000, C216S016000, C216S017000, C216S018000, C204S192320

Reexamination Certificate

active

07403095

ABSTRACT:
A thin film resistor structure and a method of fabricating a thin film resistor structure is provided. The thin film resistor structure includes an electrical interface layer or head layer that is a combination of a Titanium (Ti) layer and a Titanium Nitride (TiN) layer. The combination of the Ti layer and the TiN layer mitigates resistance associated with the electrical interface layers.

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