Thin-film resistor layout

Details Thin-film resistor layout Thin-film resistor layout

1990-03-30

1993-06-08

LaRoche, Eugene R.

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Passive components in ics

257537, 338309, H01L 2140, H01C 1012

Patent

active

052182258

ABSTRACT:
A class of layout patterns for variable resistors and integrated circuits where the resistance is varied by varying a wiping point on a resistor line; contact is not made into the resistor line itself, but instead all contacts are made only to tabs which extend out from the resistor line. Preferred embodiments use a meander resistor line made of polysilicon within a silicon integrated circuit. Simple processing mask modifications can be used to change the geometry of the meander line to vary the resistance. The wiping point is digitally selected.

REFERENCES:
patent: 4320664 (1982-03-01), Rehn et al.
patent: 4446613 (1984-05-01), Beinglass et al.
patent: 4446613 (1984-05-01), Beinglass et al.
patent: 4695853 (1987-09-01), Hackleman et al.
patent: 4725876 (1988-02-01), Kishi
patent: 4725876 (1988-02-01), Kishi
patent: 4760369 (1988-07-01), Tiku
patent: 4947020 (1990-08-01), Imamura et al.
patent: 4948747 (1990-08-01), Pfiester
patent: 4951118 (1990-08-01), Nakamura

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