Surgery: light – thermal – and electrical application – Light – thermal – and electrical application
Patent
1999-03-31
2000-10-10
Kamm, William E.
Surgery: light, thermal, and electrical application
Light, thermal, and electrical application
A61N 100
Patent
active
061297429
ABSTRACT:
A method for forming a thin film resistor includes providing a sputter target having one or more silicon containing components and chromium diboride. For example, the one or more silicon containing components may include silicon and/or silicon carbide. The resistor film is then sputter deposited on a surface using a nitrogen containing sputter gas. The resistor material generally is sputtered to a thickness in the range of about 125 .ANG. to about 500 .ANG. while maintaining a desirable sheet resistance. The resistor film may be used in one or more electrical circuits, such as in an implantable medical device.
REFERENCES:
patent: 4379459 (1983-04-01), Stein
patent: 4476868 (1984-10-01), Thompson
patent: 4510178 (1985-04-01), Paulson et al.
patent: 4556063 (1985-12-01), Thompson et al.
patent: 4821723 (1989-04-01), Baker et al.
patent: 5127404 (1992-07-01), Wyborny et al.
patent: 5131388 (1992-07-01), Pless
patent: 5144949 (1992-09-01), Olson
patent: 5158078 (1992-10-01), Bennett et al.
patent: 5199428 (1993-04-01), Obel et al.
patent: 5207218 (1993-05-01), Carpentier et al.
patent: 5312453 (1994-05-01), Shelton et al.
patent: 5314430 (1994-05-01), Bardy
patent: 5330507 (1994-07-01), Schwartz
patent: 5331966 (1994-07-01), Bennett et al.
patent: 5354316 (1994-10-01), Keimel
patent: 5468672 (1995-11-01), Rosvold
patent: 5545186 (1996-08-01), Olson et al.
Berry, R.W., Thin Film Technology (1979).
Schroeder, D.K., Semiconductor Material and Device Characterization (1998).
Henson Kirk
Managhan Doug G.
McLaurin Allen W.
Wu Fan
Kamm William E.
Medtronic Inc.
Patton Harold R.
Woods Thomas F.
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