Thin film resistor for optoelectronic integrated circuits

Details Thin film resistor for optoelectronic integrated circuits Thin film resistor for optoelectronic integrated circuits

1997-11-24

1999-09-28

Scott, Jr., Leon

Coherent light generators

Particular beam control device

Tuning

372 45, 372 43, 372 34, H01S 320

Patent

active

059600144

ABSTRACT:
A thin film resistor for optoelectronic integrated circuits is described. A stable low resistance, thin film resistor comprising a bilayer of platinum on titanium is provided. Advantageously, the resistive layer is protected by a layer of dielectric, e.g. silicon dioxide or silicon nitride to reduce degradation from humidity an under high temperature operation at 300.degree. C. or more. The resistor may be formed on various substrates, including silicon dioxide, silicon nitride and semiconductor substrates. Applications for optoelectronic integrated circuits include integrated resistive heaters for wavelength fine tuning of a semiconductor laser array.

REFERENCES:
patent: 5173909 (1992-12-01), Sakano et al.
patent: 5536085 (1996-07-01), Li et al.

Affiliated with

Also associated with

Rating

Thin film resistor for optoelectronic integrated circuits does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thin film resistor for optoelectronic integrated circuits, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thin film resistor for optoelectronic integrated circuits will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-712188