Electrical resistors – With base extending along resistance element – Resistance element and base formed in layers
Reexamination Certificate
2009-03-26
2011-10-18
Harvey, James (Department: 2833)
Electrical resistors
With base extending along resistance element
Resistance element and base formed in layers
Reexamination Certificate
active
08040213
ABSTRACT:
In order to provide a thin-film resistor and a manufacturing method thereof capable of restraining reduction of a Q-value of varactor by reducing a parasitic capacitance between the resistor and the substrate, the thin-film resistor includes a semiconductor substrate10including an integrated circuit12having a plurality of electrode pads14placed in a distance from each other in the most upper part of a plurality of stacked interconnections, and the integrated circuit12having a passivation film16formed between the plurality of electrode pads14; a secondary interconnections18electrically connected to the electrode pads14; an insulating film20formed in a place in between the secondary interconnections18on the passivation film16; and a resistor26formed18in a predetermined place in between the secondary interconnections18on the insulating film20.
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A-S. Porret et al., “Design of High-Q Varactors for Low-Power Wireless Applications using a Standard CMOS Process”, IEEE 1999 Custom Integrated Circuits Conference, p. 641-644.
Harvey James
Oki Semiconductor Co., Ltd.
Rabin & Berdo PC
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