Thin-film resistor and method of manufacturing the same

Details Thin-film resistor and method of manufacturing the same Thin-film resistor and method of manufacturing the same

2006-12-05

2006-12-05

Parker, Kenneth (Department: 2815)

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Passive components in ics

C257S536000, C257SE27035

Reexamination Certificate

active

07145218

ABSTRACT:
The invention relates to integration of a thin-film resistor in a wiring level, such as, for example, an aluminum back-end-of-line (BEOL) technology. The thin-film resistor is formed in a wiring level on, for example, an upper surface of a dielectric layer. The thin-film resistor includes end portions tapered at an angle less than 90 degrees with respect to the upper surface. The tapered end portions provide increased surface area for making contact to the thin-film resistor without adversely affecting the resistance value of the thin-film resistor.

REFERENCES:
patent: 3601889 (1971-08-01), Kaneoya et al.
patent: 6144287 (2000-11-01), Komeda
patent: 2002/0020879 (2002-02-01), Shiiki et al.

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