Electrical resistors – Mechanically variable – Resistance value varied by removing or adding material
Reexamination Certificate
2005-12-19
2009-12-15
Enad, Elvin G (Department: 2832)
Electrical resistors
Mechanically variable
Resistance value varied by removing or adding material
C257SE21004
Reexamination Certificate
active
07633373
ABSTRACT:
A thin film resistor is formed to have very accurately defined dimensions which, in turn, allow the resistive value of the resistor to be very accurately defined. The resistor is formed on spaced-apart conductive pads which, in turn, are electrically connected to conductive plugs that are spaced apart from the resistor.
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patent: 2006/0118908 (2006-06-01), Erickson et al.
Frederique Ducroquet, et al., “Full CMP Integration of CVD TiN Damascene Sub-0.1um Metal Gate Devices For ULSI Applications”, IEEE Transactions On Electron Devices. vol. 48, No. 8, Aug. 2001, pp. 1816-1821.
H. Achard, et al., “Full CMP Integration of TiN Damascene Metal Gate Devices”, Proceeding of the 30th European Solid-State Device Research Conference, Sep. 11-13, 2000, pp. 408-411.
De Santis Joseph A.
Foote, Jr. Richard Wendell
Johnson Peter
Baisa Joselito
Enad Elvin G
National Semiconductor Corporation
Pickering Mark C.
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