Thin-film processing electromagnet for low-skew magnetic orienta

Details Thin-film processing electromagnet for low-skew magnetic orienta Thin-film processing electromagnet for low-skew magnetic orienta

1998-05-22

2000-08-22

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429816, 20429804, 118500, 118728, 156345, 335281, 335291, 335279, 335282, 335288, C23C 1434

Patent

active

061066826

ABSTRACT:
An electromagnet having one or more coils wrapped around a plate-shaped core produces a uniaxial magnetic filed in the vicinity of a substrate surface for orienting a magnetic film deposited onto the substrate surface. Variations in the magnetic mass of the plate-shaped core or in the magnetic permeability of the core mass are made to reduce angular skew and to improve uniformity of the uniaxial magnetic field. The variations generally involve a reduction in magnetic mass or permeability near a center of the core with respect to a periphery of the core. Cavities of various sizes and shapes but having symmetry with a magnetic axis can be formed in the core for this purpose.

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Paper Entitled "Manufacturing Techniques", pp. 1-28.
"Ferromagnetic Properties of Films" by Mitchell S. Cohen, M.I.T. Lincoln Laboratory, Lexington, Mass., Ch.17, pp. 17-1 thru 17-43.
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