Thin film probe card

Details Thin film probe card Thin film probe card

2006-11-13

2009-08-11

Hollington, Jermele M (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

07573277

ABSTRACT:
A thin film probe card includes a plate and a plurality of wires on the plate, each of which is electrically connected with at least a thin film probe. A plurality of elastic members are provided between the probes, which absorbs the force of the probes in the test to protect the probes from wear and extend the product life of the probe card.

REFERENCES:
patent: 6791347 (2004-09-01), Ishizaka et al.
patent: 6900647 (2005-05-01), Yoshida et al.
patent: 6917211 (2005-07-01), Yoshida et al.
patent: 2004/0021474 (2004-02-01), Crippen
patent: 2005/0007130 (2005-01-01), Yoshida et al.
patent: 2005/0184745 (2005-08-01), Machida et al.
patent: 2007/0103178 (2007-05-01), Kasukabe et al.
patent: 2007/0296435 (2007-12-01), Eldridge et al.
patent: 2008/0238458 (2008-10-01), Eldridge
patent: 2009/0121732 (2009-05-01), Crafts et al.

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