Thin film probe

Stock material or miscellaneous articles – All metal or with adjacent metals – Composite; i.e. – plural – adjacent – spatially distinct metal...

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428622, 428623, 324754, 324755, 324757, H01L 2166, G01R 3126

Patent

active

056269714

ABSTRACT:
The present invention relates to a multichip module comprising one or more thin film probes. The thin film probes are useful in in situ probe testing of IC chips. An assembly comprising the multichip module and a circuit board having IC chips in a number corresponding to the number of thin film probes is also claimed.

REFERENCES:
patent: 3382632 (1968-05-01), Ardezzone
patent: 4963225 (1990-10-01), Lehman-Lamer
patent: 5091769 (1992-02-01), Eichelberger
patent: 5123850 (1992-06-01), Elder et al.
patent: 5262718 (1993-11-01), Svendsen et al.
patent: 5374893 (1994-12-01), Koopman et al.
patent: 5406210 (1995-04-01), Pedder
patent: 5440239 (1995-08-01), Zappella et al.

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