Radiant energy – Ionic separation or analysis – With sample supply means
Patent
1994-10-07
1996-01-02
Anderson, Bruce C.
Radiant energy
Ionic separation or analysis
With sample supply means
250281, B01D 5944, H01J 4900
Patent
active
054811104
ABSTRACT:
A preconcentrator is provided for use in a solid state mass spectrograph for analyzing a sample gas. The mass spectrograph is formed from a semiconductor substrate and has a cavity with an inlet, a gas ionizing section adjacent the inlet, a mass filter section adjacent the gas ionizing section and a detector section adjacent the mass filter section. The preconcentrator is provided in the mass spectrograph between the inlet and gas ionizing section. The preconcentrator includes an array of preconcentrating elements, each of which is built upon a semiconductor substrate upon which a dielectric membrane has been deposited. An absorber is provided on the membrane for collecting and concentrating the gas to be sampled. Heater means provided on the membrane releases the absorbed sample gas from the absorber.
REFERENCES:
patent: 4759210 (1988-07-01), Wohltjen
patent: 4839143 (1989-06-01), Vora et al.
patent: 4987767 (1991-01-01), Corrigan et al.
patent: 5083019 (1992-01-01), Spangler
patent: 5109691 (1992-05-01), Corrigan et al.
patent: 5345809 (1994-09-01), Corrigan et al.
patent: 5386115 (1995-01-01), Freidhoff et al.
J. W. Grate et al., "Solubility Interactions And The Design of Chemically Selective Sorben Coatings For Chemical Sensors And Arrays", 3 Sensors & Actuators B 85 (1991).
W. H. King, "Piezoelectric Sorpiton Detector", 36 Anal. Chem., 1735 (1964).
J. L. Cheney and J. B. Homolya, "A Systematic Approach For The Evaluation OF Triethanolamine As A Possible Sulfur Dioxide Soption Detector Coating", 75 Anal. Letts. 75 (1975).
K. H. Karmarkar et al., "The Detection Of Ammonia And Nitrogen Dioxide At The Parts Per Billion Level With Coated Piezoelectric Crystal Detectors", 75 Anal. Chim. Acta 111 (1975).
J. Hlavay et al., "Detection of Ammonia In Ambient Air With Coated PIezoelectric Crystal Detector", 50 Anal. Chem. 1044 (1978).
M. S. Nieuwenhuizen et al., "Processes Involved At The Chemical Interface of a SAW Chemosensor", 11 Sensors and Actuators 45 (1987).
G. G. Guilbault et al., "A Coated Piezoelectric Crystal To Detect Organophosphorous Compounds And Pesticides", 2 Sensors and Actuators 43 (1981/82).
Y. Tomita et al., "Detection of Explosives With A Coated Piezoelectric Quartz Crystal", 51 Anal. Chem. 1475 (1979).
A/ Snow et al., "Poly(ethylene maleate)--Cyclopentadiene; A Model Reactive Polymer-Vapor System For Evaluation of a SAW Microsensor", 56 Anal. Chem. (1979).
J. W. Grate et al., "A Smart Sensor System Utilizing A surface Acoustic Wave Vapor Sensor Array and Pattern Recognition For Selective Trace Organic Vapor Detection: PartI", NRL Memorandum Report No. 1916 (1991).
S. Hoshinouchi et al., "Fabrication Of A Fine Heating Element For Microelectronics", 2nd Int. Conf. on Vac. Microeectron., Bath, p. 13 (1989.
P. Hille et al., "A Heated Membrane For A Capacitive Gas Sensor" 32 Sensors and Actuators A 321 (1989).
K. D. Schierbaum et al., "Prototype Structure For Systematic Investigations Of Thin-film Gas Sensors" 1 Sensors and Actuators B 171 (1990.
Freidhoff Carl B.
Krishnaswamy Silaipillayarputhur V.
Anderson Bruce C.
Edwards C. O.
Westinghouse Electric Corp
LandOfFree
Thin film preconcentrator array does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Thin film preconcentrator array, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thin film preconcentrator array will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-237149