Thin film platinum resistance thermometer with high temperature

Details Thin film platinum resistance thermometer with high temperature Thin film platinum resistance thermometer with high temperature

1986-02-13

1988-12-13

Goldberg, E. A.

Electrical resistors

Resistance value responsive to a condition

Ambient temperature

338308, H01C 304, H01C 702

Patent

active

047913983

ABSTRACT:
A thin film platinum resistance thermometer capable of operation at elevated temperatures includes a benign dielectric layer covering the thin film platinum resistance temperature sensing element and a barrier layer overlying the dielectric layer. The barrier layer, which is preferrably titanium dioxide, resists diffusion of contaminants which would alter the electrical characteristics of the sensing element, while permitting diffusion of oxygen through the barrier layer.

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patent: 4222025 (1980-09-01), Iles et al.
patent: 4282507 (1981-08-01), Tindall et al.
patent: 4447824 (1984-05-01), Logan et al.

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