Thin film planarization process for fabricating magnetic heads e

Metal working – Method of mechanical manufacture – Electrical device making

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360125, 427131, G11B 542

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active

052823083

ABSTRACT:
A method for fabricating a thin film magnetic head assembly including the procedure of hardening a portion of the upper pole-tip photoresist mask to create a planarizing stitching pedestal in the region where the upper pole-tip overlaps with the upper pole-yoke. The upper pole assembly is deposited in two steps to create a stitched pole consisting of an upper pole-tip joined to an upper pole-yoke element at the stitching pedestal. The method reduces process complexity by eliminating masking steps and also eliminates the usual close alignment requirements for upper insulation and pole-yoke deposition procedures, thereby improving process yield.

REFERENCES:
patent: 4652954 (1987-02-01), Church
patent: 4839197 (1989-06-01), Henderson
patent: 4841624 (1989-06-01), Togawa et al.
"Electromagnetic Transducer With Thin-Film Pole Pieces" by A. Paton, IBM Tech Discl Bltn, vol. 15, No. 7, Dec. 1972, p. 2182.
"Fabrication Of Thin Film Inductive Heads With Top Core Separated Structure", Kawabe et al, IEEE Trans. Mag., vol. 27, No. 6, Nov. 1991, pp. 4936-4938.

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