Thin-film piezoelectric resonator and method for fabricating...

Wave transmission lines and networks – Coupling networks – Electromechanical filter

Reexamination Certificate

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C333S189000

Reexamination Certificate

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06977563

ABSTRACT:
A thin-film piezoelectric resonator including a piezoelectric thin film having piezoelectric characteristic, and an upper electrode and a lower electrode arranged on opposite surfaces of the piezoelectric thin film for applying an excitation voltage to the piezoelectric thin film, wherein: each of the upper electrode and the lower electrode includes a resonant portion, and a lead-out portion; and the electrode thickness of at least one part of the lead-out portion in at least one of the upper electrode and the lower electrode is larger than the electrode thickness of the resonant portion formed to be continued from the lead-out portion.

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