Coating processes – Electrical product produced – Piezoelectric properties
Patent
1997-12-16
2000-11-21
Talbot, Brian K.
Coating processes
Electrical product produced
Piezoelectric properties
4271263, 427379, 427380, 29 2535, B05D 512
Patent
active
061499684
ABSTRACT:
The thin film piezoelectric device which has excellent properties is disclosed. A thin film piezoelectric device according to the present invention comprises a piezoelectric film which is polycrystalline, and two electrodes by which the piezoelectric film is sandwiched, wherein the size of crystal grains of the piezoelectric film substance is 0.4 .mu.m or more and equal to or less than the thickness of the piezoelectric film. A process for producing the thin film piezoelectric device are also disclosed. The process comprising the steps of: forming the precursor film of a piezoelectric film on an electrode, first heating the electrode at a temperature of 500 to 700.degree. C. to crystallize the precursor film, thereby obtaining a piezoelectric film which is polycrystalline, and secondly heating the electrode at a temperature of 750 to 1200.degree. C. in an oxygen-containing atmosphere, thereby controlling the size of crystal grains of the piezoelectric film, observable from the surface of the piezoelectric film to 0.4 .mu.m or more.
REFERENCES:
patent: 4568848 (1986-02-01), Ogawa
patent: 5221872 (1993-06-01), Nishida et al.
patent: 5295288 (1994-03-01), Dam et al.
patent: 5359760 (1994-11-01), Busse et al.
patent: 5430344 (1995-07-01), Takeuchi et al.
patent: 5453294 (1995-09-01), Ogi et al.
patent: 5500988 (1996-03-01), Moynihan et al.
Patent Abstract of Japan, vol. 012, No. 012, No. 00S (C-467), Jan. 8, 1988, (Matsuhsita Electric Ind. Co. Ltd) Jul. 17, 1987.
Patent Abstracts of Japan, vol. 017, No. 342 (C-1076) Jun. 29, 1993, (Hitachi Ltd) Feb. 23, 1993.
Kumar, C.V.R. V., et al. "Lead Zirconate . . . " Appl. Phys. Lett. 58 (11) Mar. 18, 1991 American Institute of Physics pp. 1161-1163.
Seiko Epson Corporation
Talbot Brian K.
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